High-precision spin coater for a synchrotron radiation...

High-precision spin coater for a synchrotron radiation in situ GISAXS system: for the investigation of formation mechanisms of self-assembled structures in polymer thin films

Ogawa, Hiroki, Miyazaki, Tsukasa, Shimokita, Keisuke, Fujiwara, Akihiko, Takenaka, Mikihito, Yamada, Tatsuya, Sugihara, Yasunori, Takata, Masaki
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Volume:
46
Language:
english
Journal:
Journal of Applied Crystallography
DOI:
10.1107/s0021889813024151
Date:
December, 2013
File:
PDF, 508 KB
english, 2013
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