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Hybrid model for the calculation of ion distribution functions behind a direct current or radio frequency driven plasma boundary sheath
Kratzer, Matthias, Brinkmann, Ralf Peter, Sabisch, Winfried, Schmidt, HaraldVolume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1389081
File:
PDF, 347 KB
english, 2001