Simulation study on the influence of distribution of...

Simulation study on the influence of distribution of temperature, gas flow rate and gas component on SiC nanowires grew in self-designed CVD reaction chamber

Li, Zhenjiang, Liu, Xiaolong, Zhang, Meng, Zhai, Meixin
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Volume:
96
Language:
english
Journal:
Computational Materials Science
DOI:
10.1016/j.commatsci.2014.09.004
Date:
January, 2015
File:
PDF, 1.58 MB
english, 2015
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