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Standard AZ 5214E photoresist in laser interference and EBDW lithographies
Škriniarová, J., Andok, R., Pudiš, D., Benčurová, A., Nemec, P., Šušlik, L.Volume:
111
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2014.09.012
Date:
January, 2015
File:
PDF, 996 KB
english, 2015