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Differentially pumped quadrupole SIMS probe on FIB-based and two-beam microscopes
Chater, Richard J., Shollock, Barbara A., McPhail, David S., Smith, Alan J., Cooke, GrahamVolume:
46
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5665
Date:
November, 2014
File:
PDF, 1.22 MB
english, 2014