Substrate Biasing Effect on the Physical Properties of...

ACS Applied Materials & Interfaces 2014 / 02 Vol. 6; Iss. 4

Substrate Biasing Effect on the Physical Properties of Reactive RF-Magnetron-Sputtered Aluminum Oxide Dielectric Films on ITO Glasses

Liang, Ling Yan, Cao, Hong Tao, Liu, Quan, Jiang, Ke Min, Liu, Zhi Min, Zhuge, Fei, Deng, Fu Ling
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Volume:
6
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am4055589
Date:
February, 2014
File:
PDF, 2.55 MB
english, 2014
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