Diffraction-assisted micropatterning of silicon surfaces by...

Journal of Applied Physics 2014 / 06 Vol. 115; Iss. 22

Diffraction-assisted micropatterning of silicon surfaces by ns-laser irradiation

Haro-Poniatowski, E., Acosta-Zepeda, C., Mecalco, G., Hernández-Pozos, J. L., Batina, N., Morales-Reyes, I., Bonse, J.
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Volume:
115
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4882660
Date:
June, 2014
File:
PDF, 1.48 MB
english, 2014
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