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Piezo-FET Stress-Sensor Arrays for Wire-Bonding Characterization
Doelle, M., Peters, C., Ruther, P., Paul, O.Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.863702
Date:
February, 2006
File:
PDF, 1.44 MB
english, 2006