Vacancy-Oxygen Pairs and Vacancy-Oxygen-Hydrogen Complexes in Electron-Irradiated n-type Cz-Si Pre-Doped with Hydrogen
Nakanishi, Akiko, Fukata, Naoki, Suezawa, MasashiVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.6737
Date:
November, 2003
File:
PDF, 99 KB
english, 2003