Stress investigation of PECVD dielectric layers for...

Journal of Micromechanics and Microengineering 2004 / 03 Vol. 14; Iss. 3

Stress investigation of PECVD dielectric layers for advanced optical MEMS

Tarraf, A, Daleiden, J, Irmer, S, Prasai, D, Hillmer, H
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Volume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/3/001
Date:
March, 2004
File:
PDF, 447 KB
english, 2004
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