Real-Time Monitoring of the Etching of GaAs(100) by Surface...

Langmuir 1998 / 03 Vol. 14; Iss. 6

Real-Time Monitoring of the Etching of GaAs(100) by Surface Photoabsorption

Fang, Hongbin, Eng,, Joseph, Su, Chaochin, Vemuri, Sujata, Herman, Irving P., Bent, Brian E.
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Volume:
14
Language:
english
Journal:
Langmuir
DOI:
10.1021/la970725p
Date:
March, 1998
File:
PDF, 96 KB
english, 1998
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