Tungsten Nitrido Complexes as Precursors for Low...

Tungsten Nitrido Complexes as Precursors for Low Temperature Chemical Vapor Deposition of WN x C y Films as Diffusion Barriers for Cu Metallization

McClain, K. Randall, O’Donohue, Christopher, Koley, Arijit, Bonsu, Richard O., Abboud, Khalil A., Revelli, Joseph C., Anderson, Timothy J., McElwee-White, Lisa
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Volume:
136
Language:
english
Journal:
Journal of the American Chemical Society
DOI:
10.1021/ja4117582
Date:
January, 2014
File:
PDF, 4.18 MB
english, 2014
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