Sub-10 nm Nanoimprint Lithography by Wafer Bowing

Nano Letters 2008 / 11 Vol. 8; Iss. 11

Sub-10 nm Nanoimprint Lithography by Wafer Bowing

Wu, Wei, Tong, William M., Bartman, Jonathan, Chen, Yufeng, Walmsley, Robert, Yu, Zhaoning, Xia, Qiangfei, Park, Inkyu, Picciotto, Carl, Gao, Jun, Wang, Shih-Yuan, Morecroft, Deborah, Yang, Joel, Berg
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Volume:
8
Language:
english
Journal:
Nano Letters
DOI:
10.1021/nl802295n
Date:
November, 2008
File:
PDF, 1.54 MB
english, 2008
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