Application of a Fringe Capacitive Sensor to Small-Distance Measurement
Wang, Dau-Chung, Chou, Jung-Chuan, Wang, Shih-Ming, Lu, Po-Lun, Liao, Lan-PinVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.5816
Date:
September, 2003
File:
PDF, 118 KB
english, 2003