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[IEEE 21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings - Tel-Aviv, Israel (11-12 April 2000)] 21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings (Cat. No.00EX377) - Novel CMOS compatible frontside micromachining of integrated thermoelectric sensors
Socher, E., Bochobza-Degani, O., Nemirovsky, Y.Year:
2000
Language:
english
DOI:
10.1109/eeei.2000.924455
File:
PDF, 294 KB
english, 2000