Design, fabrication and characterization of a piezoelectric...

Journal of Micromechanics and Microengineering 2013 / 12 Vol. 23; Iss. 12

Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor

Hu, Zhongxu, Hedley, John, Keegan, Neil, Spoors, Julia, Waugh, William, Gallacher, Barry, Boillot, François-Xavier, Collet, Joël, McNeil, Calum
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/12/125019
Date:
December, 2013
File:
PDF, 2.00 MB
english, 2013
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