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Fabrication and characterization of reactive nanoscale multilayer systems for low-temperature bonding in microsystem technology
Boettge, Bianca, Braeuer, Joerg, Wiemer, Maik, Petzold, Matthias, Bagdahn, Joerg, Gessner, ThomasVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/6/064018
Date:
June, 2010
File:
PDF, 1.05 MB
english, 2010