Atomic Layer Deposition of Gallium Sulfide Films Using...

Chemistry of Materials 2014 / 01 Vol. 26; Iss. 2

Atomic Layer Deposition of Gallium Sulfide Films Using Hexakis(dimethylamido)digallium and Hydrogen Sulfide

Meng, Xiangbo, Libera, Joseph A., Fister, Timothy T., Zhou, Hua, Hedlund, Jenny K., Fenter, Paul, Elam, Jeffrey W.
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Volume:
26
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm4031057
Date:
January, 2014
File:
PDF, 1.87 MB
english, 2014
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