Properties of Low-Dimentional Polysilicon in SOI Structures...

Advanced Materials Research 2013 / 11 Vol. 854

Properties of Low-Dimentional Polysilicon in SOI Structures for Low Temperature Sensors

Druzhinin, Anatoly, Khoverko, Yu., Kogut, Igor, Koretskii, R.
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Volume:
854
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.854.49
Date:
November, 2013
File:
PDF, 1.16 MB
english, 2013
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