Stabilization of Tetragonal HfO 2...

Chemistry of Materials 2012 / 09 Vol. 24; Iss. 18

Stabilization of Tetragonal HfO 2 under Low Active Oxygen Source Environment in Atomic Layer Deposition

Cho, Deok-Yong, Jung, Hyung Suk, Yu, Il-Hyuk, Yoon, Jung Ho, Kim, Hyo Kyeom, Lee, Sang Young, Jeon, Sang Ho, Han, Seungwu, Kim, Jeong Hwan, Park, Tae Joo, Park, Byeong-Gyu, Hwang, Cheol Seong
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm3001199
Date:
September, 2012
File:
PDF, 2.13 MB
english, 2012
Conversion to is in progress
Conversion to is failed