Molecular Glass Resists for High-Resolution Patterning
Dai, Junyan, Chang, Seung Wook, Hamad, Alyssandrea, Yang, Da, Felix, Nelson, Ober, Christopher K.Volume:
18
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm052452m
Date:
July, 2006
File:
PDF, 411 KB
english, 2006