Stress-Driven Oxidation Chemistry of Wet Silicon Surfaces

Stress-Driven Oxidation Chemistry of Wet Silicon Surfaces

Colombi Ciacchi, Lucio, Cole, Daniel J., Payne, Mike C., Gumbsch, Peter
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Volume:
112
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp804078n
Date:
August, 2008
File:
PDF, 778 KB
english, 2008
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