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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Wafer scale fabrication of highly integrated rubidium vapor cells
Overstolz, T., Haesler, J., Bergonzi, G., Pezous, A., Clerc, P.-A., Ischer, S., Kaufmann, J., Despont, M.Year:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765700
File:
PDF, 843 KB
english, 2014