Atomic layer deposition of aluminum-doped zinc oxide films...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2013 Vol. 31; Iss. 1

Atomic layer deposition of aluminum-doped zinc oxide films for the light harvesting enhancement of a nanostructured silicon solar cell

Chen, Sheng-Hui, Chan, Shih-Hao, Chen, Chun-Ko, Tseng, Shao-Ze, Hsu, Chieh-Hsiang, Cho, Wen-Hao
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4767837
File:
PDF, 1.51 MB
english, 2013
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