Microstructuring of p-Si(1 0 0) by...

Electrochemistry Communications 2007 Vol. 9; Iss. 10

Microstructuring of p-Si(1 0 0) by localized electrochemical polishing using patterned agarose as a stamp

Li Zhang, Jin-Liang Zhuang, Xin-Zhou Ma, Jing Tang, Zhao-Wu Tian
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Volume:
9
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.elecom.2007.07.035
File:
PDF, 824 KB
english, 2007
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