[IEEE Nanophotonics - Istanbul, Turkey (2011.08.8-2011.08.11)] 16th International Conference on Optical MEMS and Nanophotonics - Development of CMOS MEMS thermal bimorph actuator for driving microlens
Koh, Kah How, Lee, Chengkuo, Lu, Jyun-Hong, Chen, Chii-ChangYear:
2011
Language:
english
DOI:
10.1109/omems.2011.6031057
File:
PDF, 717 KB
english, 2011