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Porous silicon oxynitrides formed by ammonia heat treatment
Tsao, S. S., Guilinger, T. R., Kelly, M. J., Stein, H. J., Barbour, J. C., Knapp, J. A.Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346077
File:
PDF, 789 KB
english, 1990