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Ordered nanopore boring in silicon: Metal-assisted etching using a self-aligned block copolymer Au nanoparticle template and gravity accelerated etching
Sebastian Bauer, Johannes G. Brunner, Himendra Jha, Yukiko Yasukawa, Hidetaka Asoh, Sachiko Ono, Heike Böhm, Joachim P. Spatz, Patrik SchmukiVolume:
12
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.elecom.2010.02.001
File:
PDF, 453 KB
english, 2010