An Effective Interlayer Dielectric and Passivation Scheme...

Integrated Ferroelectrics 2002 / 01 Vol. 47; Iss. 1

An Effective Interlayer Dielectric and Passivation Scheme Using Reactively Sputtered AL 2 O 3 for (Ba,Sr)TiO 3 Capacitors

Kassam, A., Koutsaroff, I., Mcneil, L., Obeng, J., Woo, P., Zelner, M.
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Volume:
47
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215402
Date:
January, 2002
File:
PDF, 544 KB
english, 2002
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