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Developing integrated piezoelectric direct current sensor with actuating and sensing elements
Kobayashi, Takeshi, Maeda, Ryutaro, Suzuki, Yasuhiro, Itoh, Toshihiro, Wang, Dong F.Volume:
8
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2013.0584
Date:
December, 2013
File:
PDF, 266 KB
english, 2013