Anodic dissolution of tantalum and niobium in acetone solvent with halogen additives for electrochemical synthesis of Ta2O5 and Nb2O5 thin films
Kai Kamada, Maki Mukai, Yasumichi MatsumotoVolume:
49
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.electacta.2003.08.014
File:
PDF, 239 KB
english, 2004