![](/img/cover-not-exists.png)
History of atomic layer deposition and its relationship with the American Vacuum Society
Parsons, Gregory N., Elam, Jeffrey W., George, Steven M., Haukka, Suvi, Jeon, Hyeongtag, (Erwin) Kessels, W. M. M., Leskelä, Markku, Poodt, Paul, Ritala, Mikko, Rossnagel, Steven M.Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4816548
File:
PDF, 2.07 MB
english, 2013