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Dynamics and temperature dependence of etching processes of porous and barrier aluminum oxide layers
Dmitri A. Brevnov, G.V. Rama Rao, Gabriel P. López, Plamen B. AtanassovVolume:
49
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.electacta.2004.02.003
File:
PDF, 184 KB
english, 2004