Application of Electroless Nickel−Boron Films for...

Chemistry of Materials 2002 / 11 Vol. 14; Iss. 11

Application of Electroless Nickel−Boron Films for High-Selectivity Pattern Transfer Processes

Ma, David I., Shirey, Loretta, McCarthy, Daniel, Thompson, Alan, Qadri, Syed B., Dressick, Walter J., Chen, Mu-San, Calvert, Jeffrey M., Kapur, Ravi, Brandow, Susan L.
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Volume:
14
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm0202308
Date:
November, 2002
File:
PDF, 275 KB
english, 2002
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