Selective etching of n-InP(1 0 0)...

Electrochimica Acta 2006 Vol. 51; Iss. 11

Selective etching of n-InP(1 0 0) triggered at surface dislocations induced by nanoscratching

R. Gassilloud, J. Michler, C. Ballif, Ph. Gasser, P. Schmuki
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Volume:
51
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.electacta.2005.03.085
File:
PDF, 338 KB
english, 2006
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