Characterization of strained Si wafer surface by density...

Characterization of strained Si wafer surface by density functional theory analysis

Kaoruho Sakata, Takayuki Homma, Hiromi Nakai, Tetsuya Osaka
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Volume:
51
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.electacta.2005.05.061
File:
PDF, 187 KB
english, 2005
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