Electron-electron interaction induced beam displacement in...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2005 Vol. 23; Iss. 6

Electron-electron interaction induced beam displacement in a multiple electron beam system

Yu, Ming L., Coyle, Steven T., DeVore, William, Shamoun, Bassam
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Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2101788
File:
PDF, 435 KB
english, 2005
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