Design of an RF-Heated Bulk AlN Growth Reactor: Induction Heating and Heat Transfer Modeling
Wu, Bei, Noveski, Vladimir, Zhang, Hui, Schlesser, Raoul, Mahajan, Subhash, Beaudoin, Stephen, Sitar, ZlatkoVolume:
5
Language:
english
Journal:
Crystal Growth & Design
DOI:
10.1021/cg050014m
Date:
July, 2005
File:
PDF, 395 KB
english, 2005