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[IEEE 2010 International Conference on Information and Automation (ICIA) - Harbin, China (2010.06.20-2010.06.23)] The 2010 IEEE International Conference on Information and Automation - Five-beam Interference Pattern Model for laser interference lithography
Deng, Xiangying, Hu, Zhen, Xiu, Guowei, Li, Dayou, Yue, Yong, Song, Zhengxun, Weng, Zhankun, Xu, Jia, Wang, ZuobinYear:
2010
Language:
english
DOI:
10.1109/icinfa.2010.5512128
File:
PDF, 436 KB
english, 2010