[IEEE IEEE Micro Electro Mechanical Systems An...

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[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Fine frequency tuning in resonant sensors

Cabuz, C., Fukatsu, K., Hashimoto, H., Shoji, S., Kurabayashi, T., Minami, K., Esashi, M.
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Year:
1994
Language:
english
DOI:
10.1109/MEMSYS.1994.555760
File:
PDF, 531 KB
english, 1994
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