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[IEEE 2014 International Conference on Microelectronic Test Structures (ICMTS) - Udine, Italy (2014.3.24-2014.3.27)] 2014 International Conference on Microelectronic Test Structures (ICMTS) - 3D IC testing using a chip prober and a transparent membrane probe card
Watanabe, Naoya, Aoyagi, Masahiro, Eto, Michiyuki, Kawano, KenjiYear:
2014
Language:
english
DOI:
10.1109/ICMTS.2014.6841474
File:
PDF, 5.18 MB
english, 2014