Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurry. Part I. Elucidating slurry chemistry
Magi Nagar, David Starosvetsky, Jan Vaes, Yair Ein-EliVolume:
55
Year:
2010
Language:
english
Pages:
12
DOI:
10.1016/j.electacta.2009.12.088
File:
PDF, 2.13 MB
english, 2010