A Compliant MEMS Device for Out-of-Plane Displacements With...

Journal of Microelectromechanical Systems 2014 / 6 Vol. 23; Iss. 3

A Compliant MEMS Device for Out-of-Plane Displacements With Thermo-Electric Actuation

Vitellaro, Giuseppe, L'Episcopo, Gaetano, Trigona, Carlo, Ando, Bruno, Baglio, Salvatore
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Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2283520
Date:
June, 2014
File:
PDF, 3.59 MB
english, 2014
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