[IEEE 2014 14th International Workshop on Junction Technology (IWJT) - Shanghai, China (2014.5.18-2014.5.20)] 2014 International Workshop on Junction Technology (IWJT) - Low contact resistances using carrier activation enhancement for Germanium CMOSFETs
Miyoshi, Hidenori, Ueno, Tetsuji, Hirota, Yoshihiro, Yamanaka, Junji, Arimoto, Keisuke, Nakagawa, Kiyokazu, Kaitsuka, TakanobuYear:
2014
Language:
english
DOI:
10.1109/IWJT.2014.6842049
File:
PDF, 403 KB
english, 2014