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[IEEE 1998 IEEE International SOI Conference Proceedings - Stuart, FL, USA (5-8 Oct. 1998)] 1998 IEEE International SOI Conference Proceedings (Cat No.98CH36199) - Detailed characterization of Unibond/sup R/ structure buried oxide [SOI]
Maleville, C., Barge, T., Henaux, S., Auberton-Herve, A.J., Aspar, B., Moriceau, H.Year:
1998
Language:
english
DOI:
10.1109/SOI.1998.723098
File:
PDF, 317 KB
english, 1998