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[IEEE 2001 International Symposium on Electron Devices for Microwave and Optoelectronic Applications. EDMO 2001 - Vienna, Austria (15-16 Nov. 2001)] 2001 International Symposium on Electron Devices for Microwave and Optoelectronic Applications. EDMO 2001 (Cat. No.01TH8567) - The high quality low temperature oxidation technology in a quasi self-aligned SiGe HBT
Li-Shyue Lai,, Yang-Tai Tseng,, Lurng-Sheng Lee,, Yuh-Sheng Jean,, Yu-Min Hsu,, Hang-Ping Hwang,, Shin-Chii Lu,, Ming-Jim Tsai,Year:
2001
Language:
english
DOI:
10.1109/EDMO.2001.974287
File:
PDF, 350 KB
english, 2001