[IEEE 2001 International Symposium on Electron Devices for Microwave and Optoelectronic Applications. EDMO 2001 - Vienna, Austria (15-16 Nov. 2001)] 2001 International Symposium on Electron Devices for Microwave and Optoelectronic Applications. EDMO 2001 (Cat. No.01TH8567) - The high quality low temperature oxidation technology in a quasi self-aligned SiGe HBT

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