[IEEE 2010 IEEE International Conference of Electron Devices and Solid- State Circuits (EDSSC) - Hong Kong (2010.12.15-2010.12.17)] 2010 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC) - Electrical characterization of self-aligned titanium silicide SBDs formed by furnace annealing
Barbarini, E, Ferrero, S, Pirri, C FYear:
2010
Language:
english
DOI:
10.1109/EDSSC.2010.5713677
File:
PDF, 890 KB
english, 2010