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[IEEE IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - San Diego, CA, USA (19-22 May 1997)] IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - Hydrodynamic and analytical models for plasma immersion ion implantation with dielectric substrates
Yuanzhong Zhou,, Shu Qin,, Chung Chan,Year:
1997
Language:
english
DOI:
10.1109/PLASMA.1997.604449
File:
PDF, 106 KB
english, 1997