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[IEEE 2009 10th International Conferene on Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Delft, The Netherlands (2009.04.26-2009.04.29)] EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Design and simulation study for an electro-thermally actuated micromanipulator
Voicu, Rodica, Tibeica, Catalin, Muller, RalucaYear:
2009
Language:
english
DOI:
10.1109/ESIME.2009.4938477
File:
PDF, 741 KB
english, 2009