[IEEE 2009 International Symposium on Optomechatronic Technologies (ISOT 2009) - Istanbul, Turkey (2009.09.21-2009.09.23)] 2009 International Symposium on Optomechatronic Technologies - Displacement analysis of micromirror composed of large deflection spiral beams
Horie, Mikio, Kamiya, Daiki, Sadat, Seid HosseinYear:
2009
Language:
english
DOI:
10.1109/ISOT.2009.5326099
File:
PDF, 1.47 MB
english, 2009